GB/T 21287-2021
ActiveElectronic specialty gas—Nitrogen trifluoride
电子特气 三氟化氮
Application Summary AI generated
GB/T 21287-2021 specifies the technical requirements, test methods, inspection rules, and packaging for nitrogen trifluoride (NF₃) used as an electronic specialty gas. It is applied in the semiconductor and flat-panel display industries, where NF₃ serves as a cleaning and etching gas in chemical vapor deposition (CVD) chambers and plasma etching processes. The standard ensures purity, safety, and consistency for high-precision manufacturing environments.
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